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KIAM Preprint  51, Moscow, 2012
Authors: Kim D. A., Novikov V. G., Dolgoleva G. V., Koshelev K.N., Solomyannaya A. D.
EUV-source modeling with account of detailed level kinetics included in-line into gasdynamic calculations
The model of nonstationary non-equilibrium radiative plasma with accounting for level kinetics and radiative transport in spectral lines is constructed. The modeling of spherical target explosion and emmision as a result of laser pulse is carried out. Numerical calculation of two-temperature 1D Lagrangian equations of gasdynamics is realized. Radiation field and level kinetics are accounted self-consistently by using two different approaches: using interpolation between pre-calculated tables of spectral parameters and with account of detailed level kinetics included in-line into gasdynamic calculations. The efficiency of extreme ultraviolet source based on lithium and tin laser plasma is estimated. The results have a significant value for EUV-lithography, which is used in microchip production. Obtained efficiency of EUV-source at optimal parameters of laser pulse is ~ 1% for lithium and ~ 5% for tin, that is close to experimental data.
detailed level kinetics, radiative transport, equations of radiative gasdynamics, extreme ultraviolet
Publication language: russian,  pages: 23
Research direction:
Mathematical modelling in actual problems of science and technics
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About authors:
  • Kim Dmitrii Andreevich, RAS
  • Novikov Vladimir Grigorevich,  KIAM RAS
  • Dolgoleva Galina Vladimirovna,  KIAM RAS
  • Koshelev K.N.
  • Solomyannaya Anna Dmitrievna, RAS