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KIAM Preprint  92, Moscow, 2007
Authors: Mezhenny M.V., Grebennikov V.A., Kulbatsky E.B.
The Automated Facilities for Measurement of the Macrostresses in Silicon Details
The present paper describes the way of macrostresses measurements by polarized-optical method based on application of electrooptic modulator jack; description of automated facility for stresses measurements in monocrystalline materials transparent for short infra-red radiation and the examples of its application for control of micromechanical systems.
Publication language: russian,  pages: 11
Research direction:
Programming, parallel computing, multimedia
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About authors:
  • Mezhenny M.V.
  • Grebennikov V.A.
  • Kulbatsky E.B.